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  • FZP + beamshaping optics
  • Absorption and Zernike available
  • Region of interest tomography (ROI) in Zernike 

Key parameters

Resolution (nm)Field of view (µm)eff. Pix size (nm)scan time (min)fast scan (min) 
505015nm - 25nm15 - 30< 3
10085 35nm15 - 30< 3 
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