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Dose (Z) = 300 um

Serial writing


Parameters for Helios FIB


5x5mu sink at 65nA


time

[sec]

z

[µm]

depth as measured

[µm]

15s5.575.5
207.437
259.298.5
3011.1510
5018.515-16µm (through)

double slits DS2 in 5µm W foil at 1nA


z

[µm]

nominal width

[µm]

outer width

[µm]

inner width

[µm]

bridge

[µm]

5.50.50.80.110.25
110.5


200.5