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Dose (Z) = 300 um
Serial writing
Parameters for Helios FIB
5x5mu sink at 65nA
time [sec] | z [µm] | depth as measured [µm] |
|---|---|---|
| 15s | 5.57 | 5.5 |
| 20 | 7.43 | 7 |
| 25 | 9.29 | 8.5 |
| 30 | 11.15 | 10 |
| 50 | 18.5 | 15-16µm (through) |
double slits DS2 in 5µm W foil at 1nA
z [µm] | nominal width [µm] | outer width [µm] | inner width [µm] | bridge [µm] |
|---|---|---|---|---|
| 5.5 | 0.5 | 0.8 | 0.11 | 0.25 |
| 11 | 0.5 | |||
| 20 | 0.5 |