...
tests with 0.7µm (nominal width) in 9µm sink same with 15° tilt
Double Pin Hole _ DP1_v2
Diameter of the written structures = 0.7 um
Dose (Z) = 300 um
Serial writing
...
tests with 0.7µm (nominal width) in 9µm sink same with 15° tilt
Double Pin Hole _ DP1_v2
Diameter of the written structures = 0.7 um
Dose (Z) = 300 um
Serial writing